JEL SCR3160CS 3-axis cylindrical coordinate clean mechanical arm

Characteristics of 3-axis cylindrical clean robot arm SCR3160CS;

• SCR3000CS series of 3-axis cylindrical coordinate clean robot arm for ultra-clean and dust-free room.
• Suitable for wafer handling in semiconductor production equipment and testing equipment.
• Standard arm length of mechanical arm: 100mm, 130mm, 160mm, 200mm.
• To meet the equipment requirements, you can choose the base fixing method or the flange fixing method.
• Equipped with action monitor
• Control communication mode: RS232C and parallel port I/O mode.
• The whole shaft adopts 2-phase stepping motor.
• S-curve acceleration and deceleration control mode can transport glass substrates at high speed and high precision.
• Wafer fixing methods: vacuum adsorption type, bottom support type, edge clamping type and Bernoulli non-contact type.
• Finger material: CFRP (carbon fiber), aluminum alloy, high-purity ceramics and other optional materials.
• Fingers can be provided according to the types of objects to be transported, equipment layout and other requirements.

Basic parameters of 3-axis cylindrical coordinate clean robot arm SCR3160CS;