JEL STCR4160S 4-axis cylindrical coordinate clean robot arm

Characteristics of 4-axis cylindrical coordinate clean manipulator STCR4160S;

• 4-axis cylindrical coordinate type clean robot arm STCR4000S series for ultra-clean dust-free room.
• It is suitable for wafer handling in semiconductor production equipment and inspection equipment, and the double-arm structure can shorten the arm action time when replacing wafers.
• Standard arm length of mechanical arm: 100mm, 130mm, 160mm, 200mm.
• The double-arm structure can shorten the arm action time when replacing wafers.
• To meet the equipment requirements, you can choose the base fixing method or the flange fixing method.
• Equipped with action monitor
• Control communication mode: RS232C and parallel port I/O mode.
• The whole shaft adopts 2-phase stepping motor.
• S-curve acceleration and deceleration control mode can transport semiconductor wafers at high speed and high precision.
• Wafer fixing methods: vacuum adsorption type, bottom support type, edge clamping type and Bernoulli non-contact type.
• Finger material: CFRP (carbon fiber), aluminum alloy, high-purity ceramics and other optional materials.
• Optimal fingers can be provided according to the requirements of the types of objects to be transported, equipment layout and the like.

Basic parameters of 4-axis cylindrical coordinate clean manipulator STCR4160S;