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JEL STCR4160S-F 4-axis cylindrical coordinate cleaning robot arm with turnover mechanism

Characteristics of 4-axis cylindrical coordinate clean manipulator STCR4160S-F with turnover mechanism;

  • Using the Bernoulli principle mechanical finger made by JEL, the thinned wafer can be adsorbed.
  • With high rigidity, the third joint of the arm can bear a load of 3kg (including fingers and things to be carried).
  • The stepping motor is adopted to drive, which can effectively reduce power consumption and is beneficial to energy saving.
  • Double mechanical finger structure can shorten the wafer exchange time.
  • Double-armed with turnover mechanism
  • According to the layout of the customer's equipment, the flange fixing method or the base fixing method can be selected.

 

Basic parameters of 4-axis cylindrical coordinate clean manipulator STCR4160S-F with overturning mechanism;

operational environment The atmospheric environment in the clean room
arm arms
Arrival distance 315mm (the distance from the center of the third joint of the arm)
Maximum stroke of lifting shaft

200mm / 300mm / 400mm / 450mm / 500mm / 550mm / 600mm

Transportable quality 3kg (reference at the third joint of the arm)

 

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