JEL SVCR3330S-060-PM Vacuum 3-axis cylindrical coordinate cleaning robot arm

Characteristics of vacuum 3-axis cylindrical coordinate manipulator SVCR3330S-060-PM;

• Vacuum 3-axis cylindrical coordinate manipulator SVCR3000 series
• Two-finger structure can carry trays under 4kg in the vacuum chamber.
• Compared with LVHR series mechanical arm, it has a better cost-effective advantage.
• Magnetic fluid sealing device is used at arm joints.
• Vacuum sealing: magnetic fluid sealing device and bellows
• Methods to improve cleanliness: Install 5m-class filter at the exhaust port inside the arm.
• Equipped with action monitor
• Control communication mode: RS232C and parallel port I/O mode.
• The whole shaft adopts 2-phase stepping motor.
• S-curve acceleration and deceleration control mode can transport semiconductor wafers at high speed and high precision.
• 2-phase stepping motor specifications can be selected.
• Finger material: CFRP (carbon fiber), aluminum alloy, high-purity ceramics and other optional materials.
• Wafer fixing method: down-supporting type, edge clamping type by using wafer's own weight.
• Fingers can be provided according to the actual situation of handling objects and the layout of customer equipment.

Basic parameters of vacuum 3-axis cylindrical coordinate manipulator SVCR3330S-060-PM;