JEL GTCR5280-300-AM 5-axis horizontal multi-joint clean mechanical arm

Features of 5-axis horizontal multi-joint clean manipulator GTCR5280-300-AM;

• A 5-axis horizontal multi-joint cleaning robot GTCR5000 series which can be used to transport 300mm semiconductor wafers.
• The single-arm and two-finger structure can achieve the same function as the double-arm structure.
• Suitable for wafer handling in 300mm semiconductor production equipment and inspection equipment.
• Standard arm length of mechanical arm: 210mm, 280mm.
• The robot arm can independently correspond to two foups (210 mm arm length).
• Or 3 foups (280 mm arm length)
• The two-finger structure can shorten the arm action time when changing wafers.
• To meet the equipment requirements, you can choose the base fixing method or the flange fixing method.
• Equipped with action monitor
• Control communication mode: RS232C and parallel port I/O mode.
• AC servo motor with absolute encoder specification for the whole shaft.
• Through the acceleration and deceleration control mode of S curve and the optimization of motion trajectory
• The semiconductor wafer can be transported at high speed and high precision.
• Wafer fixing methods: vacuum adsorption type, bottom support type, edge clamping type and Bernoulli non-contact type.
• Finger material: CFRP (carbon fiber), aluminum alloy, high-purity ceramics and other optional materials.
• Fingers can be provided according to the types of objects to be transported, equipment layout and other requirements.

Basic parameters of 5-axis horizontal multi-joint clean manipulator GTCR5280-300-AM;