JEL GTVCR5330-060-AM 5-axis vacuum horizontal multi-joint clean mechanical arm

Features of 5-axis vacuum horizontal multi-joint clean manipulator GTVCR5330-060-AM;

• 5-axis vacuum horizontal multi-joint clean manipulator GTVCR5000 series
• The price has been reduced, but the functions of the previous GTVHR5000 system can also be maintained.
• Can correspond to the layout of the chamber workbench placed side by side in a vacuum environment, and can flexibly adapt to various layouts of different types of equipment.
• By optimizing the space size of the robot arm, the internal volume of the vacuum chamber can be reduced.
• Very suitable for inline devices
• Standard arm length of mechanical arm: 280mm, 330mm.
• Magnetic fluid sealing device is used at arm joints.
• Vacuum sealing: magnetic fluid sealing device and bellows.
• Methods to improve cleanliness: Install 5m-class filter at the exhaust port inside the arm.
• The two-finger mechanism can shorten the arm action time when changing wafers.
• Equipped with action monitor
• Control communication mode: RS232C and parallel port I/O mode.
• AC servo motor with absolute encoder specification for the whole shaft.
• S-curve acceleration and deceleration control mode can transport semiconductor wafers at high speed and high precision.
• Finger material: CFRP (carbon fiber), aluminum alloy, high-purity ceramics and other optional materials.
• Wafer fixing method: down-supporting type, which uses the edge clamping of the wafer's own weight and the friction of O-ring to keep the position.
• Fingers can be provided according to the actual situation of handling objects and the layout of customer equipment.

Basic parameters of 5-axis vacuum horizontal multi-joint clean manipulator GTVCR5330-060-AM;