JEL GCR4210 4-axis horizontal multi-joint clean mechanical arm

Characteristics of 4-axis horizontal multi-joint clean manipulator GCR4210;

• Multi-axis and 4-axis horizontal multi-joint cleaning manipulator GCR4000-AM series for ultra-clean room.
• It is suitable for supporting wafer handling in 300mm semiconductor manufacturing devices and inspection devices.
• Standard arm length of mechanical arm: 210mm, 280mm.
• The robot arm can independently correspond to two FOUP.
• To meet the equipment requirements, you can choose the base fixing method or the flange fixing method.
• Equipped with action monitor
• Control communication mode: RS232C and parallel port I/O mode.
• AC servo motor with absolute encoder specification for the whole shaft.
• S-curve acceleration and deceleration control mode can transport glass substrates at high speed and high precision.
• The adoption of AC servo motor and the optimization of motion trajectory realize the high speed of handling action.
• It is 1.8 times faster than the GHR4000 type.
• Wafer fixing methods: vacuum adsorption type, bottom support type, edge clamping type and Bernoulli non-contact type.
• Finger material: CFRP (carbon fiber), aluminum alloy, high-purity ceramics and other optional materials.
• Fingers can be provided according to the types of objects to be transported, equipment layout and other requirements.

Product model list

Basic parameters of 4-axis horizontal multi-joint clean manipulator GCR4210;