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Wafer handling manipulator/hand
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JEL GCR4280-300-AM 4-axis horizontal multi-joint clean mechanical arm
JEL GCR4280-300-AM 4-axis horizontal multi-joint clean mechanical arm
Characteristics of 4-axis horizontal multi-joint clean manipulator GCR4280-300-AM;
- Multi-axis and 4-axis horizontal multi-joint cleaning manipulator GCR4000-AM series for ultra-clean room.
- It is suitable for supporting wafer handling in 300mm semiconductor manufacturing devices and inspection devices.
- The robot arm can correspond to 3 FOUP independently.
- To meet the equipment requirements, you can choose the base fixing method or the flange fixing method.
- Equipped with action monitor
- AC servo motor with absolute encoder specification for the whole shaft.
- S-curve acceleration and deceleration control mode can transport glass substrates at high speed and high precision.
- Finger material: CFRP (carbon fiber), aluminum alloy, high-purity ceramics and other optional materials.
- Fingers can be provided according to the types of objects to be transported, equipment layout and other requirements.
Product model list
product model | Maximum stroke of lifting shaft |
GCR4280-300-AM |
300mm |
Basic parameters of 4-axis horizontal multi-joint clean manipulator GCR4280;
operational environment | The atmospheric environment in the clean room |
arm | single-arm |
Arrival distance | 553mm (the distance from the center of the third joint of the arm) |
Maximum stroke of lifting shaft |
300mm |
Transportable quality | Less than 4kg (reference at the third joint of the arm) |