JEL SWCR3160CS Waterproof 3-axis cylindrical coordinate wafer handling robot arm

Characteristics of SWCR3160CS waterproof 3-axis cylindrical coordinate mechanical wafer handling robot arm;

• Waterproof 3-axis cylindrical coordinate manipulator SWCR3000 series (equipped with 300mm wafer turnover mechanism and edge clamping mechanism)
• Under the production process conditions of IP64 LSI semiconductor, semiconductor wafers can be transported in acidic and alkaline environments.
• Teflon coating is used for arm parts to ensure corrosion resistance.
• V-shaped sealing ring is used for waterproof structure of arm joint.
• Sealing strips made of Viton are used for the joint surfaces between parts.
• The bellows can be used for the waterproof structure of Z axis.
• Equipped with action monitor
• Control communication mode: RS232C and parallel port I/O mode.
• The whole shaft adopts 2-phase stepping motor.
• S-curve acceleration and deceleration control mode can transport semiconductor wafers at high speed and high precision.
• Wafer fixing methods: vacuum adsorption type, bottom support type and edge clamping type.
• Fingers can be provided according to the actual situation of handling objects and the layout of customer equipment.

Product model list

Basic parameters of waterproof 3-axis cylindrical coordinate mechanical wafer handling robot SWCR3160CS;