JEL SVCR3260 Vacuum 3-axis cylindrical coordinate mechanical arm

Characteristics of vacuum 3-axis cylindrical coordinate manipulator SVCR3260;

• Vacuum 3-axis cylindrical coordinate manipulator SVCR3000 series. Suitable for wafer handling in vacuum chamber.
• Compared with SVHR series mechanical arm, the handling quality can be improved by 2 times, and it has a good cost-effective advantage.
• In addition, it also maintains the compatibility with SVHR series mechanical arms, which is convenient for customers to upgrade their equipment.
• Standard arm length of mechanical arm: 160mm, 190mm, 260mm, 330mm.
• Magnetic fluid sealing device is used at arm joints.
• Vacuum sealing: magnetic fluid sealing device and bellows
• Methods to improve cleanliness: Install 5m-class filter at the exhaust port inside the arm.
• Equipped with action monitor
• Control communication mode: RS232C and parallel port I/O mode.
• The whole shaft adopts 2-phase stepping motor.
• S-curve acceleration and deceleration control mode can transport semiconductor wafers at high speed and high precision.
• 2-phase stepping motor specifications can be selected.
• Finger material: CFRP (carbon fiber), aluminum alloy, high-purity ceramics and other optional materials.
• Wafer fixing method: down-supporting type, edge clamping type by using wafer's own weight.
• Fingers can be provided according to the actual situation of handling objects and the layout of customer equipment.

Product model list

Basic parameters of SVCR3260 vacuum 3-axis cylindrical coordinate manipulator;