MITO DENKO PLD-M Composite PLD equipment

Brief introduction of PLD-M characteristics of compound PLD equipment;

• Based on very rich sales experience, the design can realize stable operation.
• Other sputtering sources and deposition sources can be combined.
• Large-diameter substrate up to φ2 inches, experiments can be carried out in a wide pressure range by using a special lamp source of φ2 inches.
• You can choose a variety of options, through the distribution installed on a large area PLD, to provide uniform distribution options for the largest φ2 inch circuit board.