MITO DENKO SOURCE-1250 Molecular beam evaporation source
Brief introduction of characteristics of molecular beam evaporation source SOURCE-1250;
- The molecular beam evaporation source is used for preparing MBE-grown thin films in ultra-high vacuum.
- Open evaporation source, which is designed to minimize gas emission when molecular beam is radiated.
- Installation flange: ICF070・114, etc.
- Temperature control: Max1250 is controlled by PID.
Molecular beam evaporation source SOURCE-1250 specifications:
(1) crucible capacity: about 10cc (lip is about 15mm x 57mm)
(2) crucible material PBN
(3) The heater is coiled with high purity Ta wire
(4) Five layers of high-purity Ta on the side reflector
(5) High-purity Mo of heating element support base
(6) Thermocouple Pr13
(7) The external shape of the heating element is Φ 35 x 50 mm.
(8) Operating temperature range is 300°C to 1250 C.
(9) The shutter is opened/closed by a micro flange rotary import machine (standard manual: air drive is optional).
(10) mounting flange 114CF (4.5 "CF)
(11) heating power supply 1KW DC power supply with current and voltage limitation.
(12) Temperature controller: PID control mode is RT~1800°C, and the maximum control accuracy is 0.1 C.
(13) Maximum baking temperature: 250°C (after removing the cable and air drive device)