MITO DENKO MBE-260 MBE device
Overview of MBE device MBE-260:
- The MBE equipment is an ultra-high vacuum device, which can be excited in vacuum by laser introduced from the outside and deposit materials on the substrate.
MBE-260 specification parameters of MBE device:
|
Configure |
Spec |
|
|
Processing room and vacuum exhaust system |
Chamber Sharp |
φ260mm Spherical SUS |
|
Reaching vacuum |
Less than6.7×10-7Pa (5×10-9Torr) |
|
|
Ceramic bearing turbo pump |
250L/s |
|
|
Target revolution unit |
φ20mm×6 axes Rotation / revolution motor drive (PC control) |
|
|
Substrate heating unit |
Infrared lamp substrate heating unit (can be changed to semiconductor laser substrate heating unit) |
|
|
Size of substrate |
10mm |
|
|
Maximum heating temperature |
Above 800℃ |
|
|
Common specification |
Power supply / control rack (JIS standard compliant) integrated chamber frame PLD automatic control system (PC and control software) |
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