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JEL SAL3262HV wafer calibrator

JEL wafer calibrator SAL3262HV Features:

  • Suitable for 2, 3-inch, 100-150 mm wafers.
  • It can be used for the position calibration of silicon wafers, silicon wafers with BG tape (milky white), transparent and translucent wafers and other wafers with different materials.
  • The self-developed image recognition sensor is used, and the controller and motor driver are integrated into the equipment body.
  • The diameter, shape and material of the Spindle can be changed according to the wafer size and material, and Bernoulli adsorption method can be used.
  • Control mode: serial RS232C or parallel optical I/O port.
  • Notches that do not conform to SEMI specifications, and the shape of missing edges can also provide customized design.
  • Z-axis can be added to Spindle to meet the demand of lifting the wafer.
  • The action of picking up the wafer again selects and sets the Z axis.

 

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