JEL SAL38C3HV Wafer calibrator
JEL wafer calibrator SAL38C3HV features:
- Suitable for 200-300 mm wafers.
- It can be used for the position calibration of silicon wafers, silicon wafers with BG tape (milky white), transparent and translucent wafers and other wafers with different materials.
- The self-developed image recognition sensor is used, and the controller and motor driver are integrated into the equipment body.
- The diameter, shape and material of the Spindle can be changed according to the wafer size and material, and Bernoulli adsorption method can be used.
- Control mode: serial RS232C or parallel optical I/O port.
- Notches that do not conform to SEMI specifications, and the shape of missing edges can also provide customized design.
- Z-axis can be added to Spindle to meet the demand of lifting the wafer.
- The action of picking up the wafer again selects and sets the Z axis.